图书馆订阅: Guest
Begell Digital Portal Begell 数字图书馆 电子图书 期刊 参考文献及会议录 研究收集
多孔介质期刊
影响因子: 1.49 5年影响因子: 1.159 SJR: 0.504 SNIP: 0.671 CiteScore™: 1.58

ISSN 打印: 1091-028X
ISSN 在线: 1934-0508

多孔介质期刊

DOI: 10.1615/JPorMedia.v13.i6.50
pages 557-563

AN EFFICIENT AND RELIABLE TWO-DIMENSIONAL PATTERNING OF POROUS SILICON

Hassan Hajghassem
Electrical Engineering Department, Shahid Beheshti University, Tehran, Iran
A. Erfanian
Electrical Engineering Department, K. N. Toosi University, Tehran, Iran
M. Mohtashamifar
Electronic Research Center, Tehran, Iran
M. Aliahmadi
Electronic Research Center, Tehran, Iran
S. Morteza Alehashemi
Electronic Research Center, Tehran, Iran
S. Maryam Banihashemian
Islamic Azad University, Qom Branch, Qom, Iran

ABSTRACT

An efficient and reliable method for patterning a two-dimensional porous Si (PS) is presented in this work. The Cr/Au (50/200 nm) layer is used as a mask for electrochemical prosification of Si to form a two-dimensional pattern of porous Si. Quality of the formed 8 × 8 pads of porous Si is analyzed using statistical image analysis, an atomic force microscope, a scanning electron microscope, and also images from an optical microscope. It is shown that a combination of photoresist patterning and Cr/Au deposition can be used to generate arrays of silicon nanoporous in selected surface regions. Our results indicate that using the Cr/Au layer as a mask during prosification of Si results in sharper patterns with higher resolution in comparison to conventionally used photoresist masks such as Shipley and SU8 photoresists. The sharpness of the formed patterns is also investigated by calculating the correlation coefficient using image processing of the formed pattern with the ideal pattern. The correlation coefficient of the patterns made by the Cr/Au mask is 0.99 and the maximum deviation of the formed pattern from the original Cr/Au pattern is 3.44 μm, which shows an almost perfect correlation of the generated array with the ideal pattern.


Articles with similar content:

APPLICATION OF IMAGE PROCESSING FOR FROST DENSITY PREDICTION
Journal of Flow Visualization and Image Processing, Vol.8, 2001, issue 4
Cheolhwan Kim, Jongmin Shin
NONWETTING PHASE RESIDUAL SATURATION IN SAND PACKS
Journal of Porous Media, Vol.13, 2010, issue 7
Stefan Iglauer, Saif Al-Sayari, Paul Gittins, Martin J. Blunt, Branko Bijeljic, Saleh Al-Mansoori, Christopher Holst Pentland
Improving the Accuracy of Determining the Boundaries of an Object in Subsurface Sensing
Telecommunications and Radio Engineering, Vol.53, 1999, issue 3
V. G. Sugak
Application of the Extended χ2-Criterion for Embedded Information Detecting
Journal of Automation and Information Sciences, Vol.47, 2015, issue 4
Lyubov L. Nikitenko
OES Spectroscopic Measurements of Temperatures and Densities of Charged Particles in Micro-Air Plasma for Gene Transfection
Plasma Medicine, Vol.7, 2017, issue 4
Masafumi Jinno, Amel Zerrouki, Mohammed Yousfi, Yoshihisa Ikeda, Hideki Motomura