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高温材料处理:国际期刊
SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN 打印: 1093-3611
ISSN 在线: 1940-4360

高温材料处理:国际期刊

DOI: 10.1615/HighTempMatProc.v5.i1.100
10 pages

ANALYSIS OF PARTICLES GENERATED IN A RADIOFREQUENCY METHANE PLASMA BY LASER LIGHT SCATTERING

Andre Plain
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France
lsabelle Geraud-Grenier
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France
Veronique Massereau-Guilbaud
LASEP, Faculte des Sciences, Universite d'Orleans, Site de Bourges, Rue G.Berger, BP 4043, 18028 BOURGES CEDEX, France

ABSTRACT

Amorphous hydrogenated carbon particles have been observed in a pure methane low pressure radiofrequency discharge at 13.56 MHz. In the plasma, the formation and the presence of two kinds of particles have been evidenced by use of laser light scattering. The study of the laser beam extinction gives informations on the generation and the behavior of the particles in the discharge. The particles are trapped into clouds located at the boundaries between the anodic and cathodic sheath and the plasma bulk. The cloud evolution has been correlated with the temporal evolutions of the experimental parameters as dc bias voltage and gas pressure. An infrared spectrometry analysis of the two kinds of particles has been realized


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