图书馆订阅: Guest
高温材料处理:国际期刊

每年出版 4 

ISSN 打印: 1093-3611

ISSN 在线: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

Indexed in

HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM

卷 23, 册 1, 2019, pp. 57-70
DOI: 10.1615/HighTempMatProc.2019029959
Get accessGet access

摘要

Inductively coupled Ar/SF6 plasma (ICP) etching p-type germanium (Ge) substrate used for a multifunction solar cell (MJ SC) was investigated at different ICP power levels and SF6 flow rates at a constant working pressure of 7 Pa. The etching rate of Ge increases linearly from 11.9 to 19.4 μm/min and surface roughness decreases as the ICP power level increases from 400 to 650 W at SF6 flow rate of 300 sccm. Also, the etching rate of Ge increases by a power law from 8.0 to 16.7 μm/min as the SF6 flow rate increases from 50 to 300 sccm at ICP power of 570 W. OES and XPS studies were carried out using NIST databases. Identifications for some calculated Ritz lines were suggested.

Begell Digital Portal Begell 数字图书馆 电子图书 期刊 参考文献及会议录 研究收集 订购及政策 Begell House 联系我们 Language English 中文 Русский Português German French Spain