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高温材料处理:国际期刊

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ISSN 打印: 1093-3611

ISSN 在线: 1940-4360

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HEAT TRANSFER FROM OXYGEN ATOMS RECOMBINATION ON SILICON CARBIDE: CHEMICAL EVOLUTION OF THE MATERIAL SURFASE

卷 4, 册 3, 2000, 14 pages
DOI: 10.1615/HighTempMatProc.v4.i3.50
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摘要

In order to quantify the energy transfer from the reactive flow to a surface, determination of recombination and accommodation coefficients (respectively γ and β coefficients) is required. The following work concerns atomic oxygen flow recombining on silicon carbide. The γ coefficient is measured in a pulsed oxygen plasma reactor in non equilibrium conditions, using an actinometiic method, whereas the β coefficient is determined in a micro-wave plasma reactor, using a calorimetric method. The βγ coefficient gives also the energetic transfer to the surface during the recombination reaction. The experimental study is undertaken on silicon carbide which presents interesting properties as refractory material. The measurements are performed on a large temperature range (300 - 1123 K) in order to point out a change in the recombination mechanism when the surface temperature rises. At the same time, the chemical structure of the material is followed by different analysis techniques (ESCA, SIMS and SEM) and shows a modification of the chemical composition of silicon carbide resulting from oxidation, ablation of the surface and diffusion of oxygen into the bulk material.

对本文的引用
  1. Guyon C., Cavadias S., Mabille I., Moscosa-Santillan M., Amouroux J., Recombination of oxygen atomic excited states produced by non-equilibrium RF plasma on different semiconductor materials: catalytic phenomena and modelling, Catalysis Today, 89, 1-2, 2004. Crossref

  2. Ueda S., Sato K., Komuro T., Tanno H., Itoh K., Kurotaki T., Surface temperature and pressure dependency of catalytic effects to flat plates in high enthalpy flow, in Shock Waves, 2005. Crossref

  3. Vesel A, Primc G, Zaplotnik R, Mozetič M, Applications of highly non-equilibrium low-pressure oxygen plasma for treatment of polymers and polymer composites on an industrial scale, Plasma Physics and Controlled Fusion, 62, 2, 2020. Crossref

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