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高温材料处理:国际期刊

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ISSN 打印: 1093-3611

ISSN 在线: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

Indexed in

PLASMA EMISSION SYSTEMS FOR ELECTRON- AND ION-BEAM TECHNOLOGIES

卷 21, 册 2, 2017, pp. 143-159
DOI: 10.1615/HighTempMatProc.2017024672
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摘要

Designs and basic characteristics of plasma sources of charged particles allowing one to realize a wide spectrum of electron- and ion-beam technologies are presented. Some applications of the developed structures of charged particles sources are considered. Sketches of promising designs of gas-discharge structures capable of forming combined electron and ion beams are proposed.

对本文的引用
  1. Bogomolov Boris K., The Role of Chlorine Atoms in Etching Silicon in the Plasma of CF<inf>2</inf>Cl<inf>2</inf>/O<inf>2</inf>, 2018 XIV International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2018. Crossref

  2. Antonovich D. A., Gruzdev V. A., Zalesski V. G., Soldatenko P. N., Plasma source of charged particles for the formation of combined ion-electron beams, Proceedings of the National Academy of Sciences of Belarus, Physical-Technical Series, 65, 3, 2020. Crossref

  3. Antonovich D A, Gruzdev V A, Experience of forming combined low-energy electron-ion beams in plasma sources of charged particles, IOP Conference Series: Materials Science and Engineering, 759, 1, 2020. Crossref

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