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高温材料处理:国际期刊
SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN 打印: 1093-3611
ISSN 在线: 1940-4360

高温材料处理:国际期刊

DOI: 10.1615/HighTempMatProc.2015013718
pages 127-135

PLASMA SOURCE WITH A COLD HOLLOW CATHODE BASED ON ARC DISCHARGE

Yury Akhmadeev
Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences
P. M. Schanin
Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 4 Akademicheskii Ave., Tomsk, 634055, Russia
Nikolay N. Koval
Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, 2/3 Akademichesky Ave., Tomsk, 634055, Russia; National Research Tomsk State University, 36 Lenin Ave., Tomsk, 634050, Russia

ABSTRACT

This paper presents the results of investigation into the generation of a gas-discharge plasma by an arc source with a cold hollow cathode. The source produces a plasma of density ~1010−1011 cm−3 in a volume of ~0.5 m3 at a discharge current of up to 120 A, a discharge operating voltage of 30−40 V, and at a pressure of 0.1−1 Pa. The motion of a cathode spot in crossed electric and magnetic fields inside the hollow cathode and a special cathode design make it possible to preclude almost completely the penetration of the sputtered cathode material into the working chamber and to increase the lifetime of the cathode. Because the cathode spot operates at an integrally cold surface of the hollow cathode, the source allows generation of a chemically active gas plasma.


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