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国际计算热科学期刊
ESCI SJR: 0.244 SNIP: 0.434 CiteScore™: 0.7

ISSN 打印: 1940-2503
ISSN 在线: 1940-2554

国际计算热科学期刊

DOI: 10.1615/ComputThermalScien.2018024691
pages 17-28

PYROELECTRIC EFFECT CONTROL: DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROHEATERS ARRAY FOR BIOMEDICAL APPLICATIONS

S. Bhowmick
Shilps Sciences Private Limited, Bangalore, India
Orlando Leo
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy
Giuseppe Coppola
Institute for Microelectronics and Microsystems, CNR, Napoli, Italy
Mariano Gioffrè
Institute for Microelectronics and Microsystems, CNR, Napoli, Italy
Marilena Musto
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy
Giuseppe Rotondo
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy
Mario Iodice
Institute for Microelectronics and Microsystems, CNR, Napoli, Italy

ABSTRACT

An innovative microheater array design is realized on a lithium niobate crystal, to induce a uniform pyroelectric effect on an area of 12.5 × 12.5 mm2. Thermal analyses of the device were performed both experimentally and numerically using a FLIR thermocamera and COMSOLTM Multiphysics.A series of preliminary numerical simulations were carried out to obtain the optimized design of the aforementioned specifications. The microheaters were fabricated on the + Z surface of the lithium niobate crystal using a photolithography process followed by titanium thin-film deposition. We performed on this device a series of electrothermal characterizations; the results of the measurements showed good agreement with the numerical model in terms of heat distribution, accomplishing a comparison between the thermal maps coming from the two methodologies.


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