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界面现象 及传热
ESCI SJR: 0.146

ISSN 打印: 2169-2785
ISSN 在线: 2167-857X

Open Access

界面现象 及传热

DOI: 10.1615/InterfacPhenomHeatTransfer.2015011646
pages 253-263

DAMPING FORCES EXERTED BY RAREFIED GAS MIXTURES IN MICRO-ELECTRO-MECHANICAL SYSTEM DEVICES VIBRATING AT HIGH FREQUENCIES

Marzia Bisi
Dipartimento di Matematica e Informatica, Universita di Parma, Parco Area delle Scienze 53/A, I-43124 Parma, Italy
Silvia Lorenzani
Dipartimento di Matematica, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy

ABSTRACT

In the present paper, we analyze the damping forces exerted by a binary gaseous mixture in Micro-Electro-Mechanical Systems (MEMS) devices vibrating at high frequencies through a kinetic model of BGK-type and diffuse reflection boundary conditions.


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