%0 Journal Article %A Bisi , Marzia %A Lorenzani, Silvia %D 2014 %I Begell House %K MEMS devices, gas mixtures, BGK-Boltzmann equation %N 3 %P 253-263 %R 10.1615/InterfacPhenomHeatTransfer.2015011646 %T DAMPING FORCES EXERTED BY RAREFIED GAS MIXTURES IN MICRO-ELECTRO-MECHANICAL SYSTEM DEVICES VIBRATING AT HIGH FREQUENCIES %U https://www.dl.begellhouse.com/journals/728e68e739b67efe,45486c2207f6f0c5,263a04d636520392.html %V 2 %X In the present paper, we analyze the damping forces exerted by a binary gaseous mixture in Micro-Electro-Mechanical Systems (MEMS) devices vibrating at high frequencies through a kinetic model of BGK-type and diffuse reflection boundary conditions. %8 2015-05-14