%0 Journal Article %A Anbia, Mansoor %A Neyzehdar, Mohsen %A Dehghan, Roghaye %D 2017 %I Begell House %K humidity sensor, mesoporous silica, MgO-MCM-41, sol-gel technique %N 3 %P 217-225 %R 10.1615/JPorMedia.v20.i3.30 %T A HUMIDITY SENSOR BASED ON MgO-MCM-41 NANOPOROUS SILICA %U https://www.dl.begellhouse.com/journals/49dcde6d4c0809db,3bea89ba0d4481ea,709850604c07681b.html %V 20 %X MgO-doped mesoporous silica MCM-41 was prepared by sol-gel technique and characterized by Fourier transform infrared spectroscopy, scanning electron microscopy, and x-ray diffraction techniques. It is clear that the MgO did not destroy the mesoporous structure of MCM-41. Different levels of MgO were doped into MCM-41 and investigated as a humidity sensor by screen printing on the alumina substrate with Ag-Pd interdigited electrode at room temperature. Comparison of MgO-MCM-41 with pure MCM-41 shows improved humidity-sensing properties. The optimal mixing ratio was 1 (R = 1), which exhibits excellent humidity sensitivity from 11% to 95% RH (relative humidity), very good response and recovery properties. The investigation of the humidity-sensitive characteristics of MgO-MCM-41 shows that this material is a promising humidity sensor. %8 2017-04-03