%0 Journal Article
%A Bhowmick, S.
%A Leo, Orlando
%A Coppola, Giuseppe
%A Gioffrè, Mariano
%A Musto, Marilena
%A Rotondo, Giuseppe
%A Iodice, Mario
%D 2019
%I Begell House
%K pyroelectric fields, lithium niobate, Joule effect, thermal effect analysis
%N 1-2
%P 17-28
%R 10.1615/ComputThermalScien.2018024691
%T PYROELECTRIC EFFECT CONTROL: DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROHEATERS ARRAY FOR BIOMEDICAL APPLICATIONS
%U https://www.dl.begellhouse.com/journals/648192910890cd0e,7344e09e13d9db41,769ecd637e88ec4c.html
%V 11
%X An innovative microheater array design is realized on a lithium niobate crystal, to induce a uniform pyroelectric effect on an area of 12.5 × 12.5 mm2. Thermal analyses of the device were performed both experimentally and numerically using a FLIR thermocamera and COMSOLTM Multiphysics.A series of preliminary numerical simulations were carried out to obtain the optimized design of the aforementioned specifications. The microheaters were fabricated on the + Z surface of the lithium niobate crystal using a photolithography process followed by titanium thin-film deposition. We performed on this device a series of electrothermal characterizations; the results of the measurements showed good agreement with the numerical model in terms of heat distribution, accomplishing a comparison between the thermal maps coming from the two methodologies.
%8 2018-09-11