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Design, Fabrication and Characterization Of a µ-Heater Array for Control Pyroelectric effect

DOI: 10.1615/ICHMT.2017.CHT-7.910
pages 889-895

Shomnath Bhowmick
Institute for microelectronics and Microsystems, CNR, Napoli, Italia

Orlando Leo
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy

Giuseppe Coppola
Institute for Microelectronics and Microsystems, CNR, Napoli, Italy

Mariano Gioffrè
Institute for Microelectronics and Microsystems, CNR, Napoli, Italy

Mario Iodice
Institute for microelectronics and Microsystems, CNR, Napoli, Italia

Marilena Musto
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy

Giuseppe Rotondo
Department of Industrial Engineering, University of Naples Federico II, Napoli, Italy

Abstract

An innovative microheater array design is realized on a lithium niobate (LiNbO3) crystal, to induce a uniform pyroelectric field on a larger area of 12.5×12.5 mm2. The pyroelectric effect is activated by the crystal as a result of the temperature gradient produce by the microheater. Thermal analyses of the device were performed both numerically and experimentally using COMSOLTM multiphysics and FLIR thermocamera. The optimized microheater geometry was obtained by a series of preliminary simulations performed using the COMSOL. The optimized microheater was then realized on the +Z surface of LiNbO3 crystal using fabrication techniques involving: photolithography, titanium thin film deposition and lift off. A series of electro-thermal characterizations were performed on the realized device. The results obtained during the experimental measurements shows a good agreement with the numerical model in terms of heat distribution and thermal profiles.

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