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Marek Elias
Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, CZ-611 37 Brno, Czech Republic
Articles:
REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVE RF DISCHARGE PLASMA REACTORS - Vol. 7 '2003 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVELY COUPLED RF DISCHARGE - Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003