STRUCTURE AND PROPERTIES OF CARBON AND HYDROCARBON FILMS DEPOSITED IN PLASMA OF LOW-PRESSURE ARC AND UNBALANCED DC MAGNETRON

I.A.  Anisimova; V.P.  Anisimov; V.P.  Makarov; D.K.  Otorbaev

doi:10.1615/HighTempMatProc.v2.i1.110

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Chefredakteurs: Valiantsin M. Astashynski (open in a new tab) Andrey V. Gusarov (open in a new tab)

Mitherausgeber: Nikolai N. Cherenda (open in a new tab)

Erscheint 4 Ausgaben pro Jahr

ISSN Druckformat: 1093-3611

ISSN Online: 1940-4360

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STRUCTURE AND PROPERTIES OF CARBON AND HYDROCARBON FILMS DEPOSITED IN PLASMA OF LOW-PRESSURE ARC AND UNBALANCED DC MAGNETRON

Volumen 2, Ausgabe 1, 1998, pp. 143-154

DOI: 10.1615/HighTempMatProc.v2.i1.110

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I.A. Anisimova
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic

V.P. Anisimov
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic

V.P. Makarov
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic

D.K. Otorbaev
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic

ABSTRAKT

Amorphous hydrogenated carbon films were deposited in the plasma of a low-pressure arc discharge burning at the evaporating graphite electrode and in the plasma of a unbalanced magnetron sputtering discharge in different gas environments (Ar, CH₄). The film structure was investigated by micro-diffraction method of transmission electron microscopy. Influence of the deposition technique and of the gas composition on the structure and on optical and electrical properties of the deposited films have been investigated.

SCHLÜSSELWÖRTER: hydrocarbon films, plasma deposition

REFERENZIERT VON

Huczko A., Lange H., Zhu Y. Q., Hsu W. K., Kroto H. W., Walton D. R. M., Non-thermal Plasma Synthesis of Nanocarbons, in Frontiers of Multifunctional Nanosystems, 2002. Crossref

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