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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

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ISSN Druckformat: 1093-3611

ISSN Online: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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X-RAY AND SINGLE CRYSTAL VALUES OF THE ELASTIC CONSTANTS AND DETERMINATION OF MACHINING RESIDUAL STRESSES IN ALN

Volumen 2, Ausgabe 3, 1998, pp. 309-326
DOI: 10.1615/HighTempMatProc.v2.i3.20
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ABSTRAKT

AlN is of increasing importance as structural material in microelectronics and microsystems in order to replace Al203. However, the knowledge of mechanical properties of this material is still restricted, and an enhanced understanding about the material behaviour of AlN requires the knowledge concerning the residual stresses. In order to determine the residual stresses by means of X-ray diffraction, X-ray elastic constants are needed which account for the elastic anisotropy and the coupling conditions of the crystallites in the polycrystalline material. Therefore, the X-ray elastic constants of AlN were determined for selected lattice planes {hkl} by X-ray diffraction. From the single crystal elastic constants calculated on the base of this knowledge, the X-ray elastic constants were derived for all sets of lattice planes {hkl} of interest. Employing these data, X-ray residual stress analyses were performed on differently machined samples of AlN.

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