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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.19 SNIP: 0.341 CiteScore™: 0.43

ISSN Druckformat: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v13.i2.20
pages 137-146

INFLUENCE OF PROCESS PARAMETERS ON STRUCTURE OF CARBON COATINGS DEPOSITED AT ATMOSPHERIC PRESSURE

L. Marcinauskas
Physics Department, Kaunas University of Technology, and Lithuanian Energy Institute, Kaunas, Lithuania
A. Grigonis
Physics Department, Kaunas University of Technology, Studentu 50, LT-51368, Kaunas, Lithuania
Vitas Valincius
Lithuanian Energy Institute, Plasma Processing Laboratory, Breslaujos 3, 44403 Kaunas, Lithuania
Pranas Valatkevicius
Lithuanian Energy Institute, Breslaujos 3, LT-4440, Kaunas, Lithuania

ABSTRAKT

Carbon coatings were deposited on the stainless steel substrates from argon-acetylene gases mixture at atmospheric pressure by arc plasma jet chemical vapor deposition (CVD). It was obtained that the increase of the torch power leads to higher growth rate and increases surface roughness. The growth rates varied in the range of 4−750 nm/s depending on the syntheses conditions. Raman spectra indicated that the bonding structure in the coatings, obtained at 600 W torch powers, changes from the typical diamond-like/graphite-like carbon to the polymer-like carbon with the increase of the distance. The FTIR spectros-copy has shown that the absorption of coatings decreases with the increase of the wave range. The IR spectra showed clear evidence of C = C and C = O sp2 bonds and presence of sp3 CH2 symmetric (2850 cm−1) and asymmetric (2920 cm−1), and sp3 CH3 asymmetric (2960 cm−1) modes in a-C:H coatings. It was obtained that the intensity of the sp2 C = C and C = O modes becomes more intense increasing the distance.


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