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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
ESCI SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN Druckformat: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v11.i4.40
pages 515-525

PROPERTIES OF ATMOSPHERIC PRESSURE GLOW DISCHARGE WITH LIQUID ELECTROLYTE CATHODE

V. A. Titov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia
V. V. Rybkin
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia
S. A. Smirnov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia
A. L. Kulentsan
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia
H.-S. Choi
Department of Chemical Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon, 305-764, Korea

ABSTRAKT

The characteristics of atmospheric pressure air glow discharge with liquid cathode have been investigated. Distilled water and aqueous solutions of KCl, and CuCl2 were utilized as a cathode. The cathode voltage drop, electric field strength, and emission intensity of some bands for N2 and OH were measured at discharge current from 10 to 50 mA. Gas temperatures and effective vibration temperatures of N2 and OH were estimated on the base of spectral measurements. The reduced electric field strength and γ emission coefficients were calculated also. The electron energy distribution function (EEDF) and some electron parameters (average energy, electron density) were estimated on the base of numerical solution of the Boltzmann kinetic equation.


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