Tenth Conference on Electromagnetic and Light Scattering
DOI: 10.1615/ICHMT.2007.ConfElectromagLigScat
ISBN Print: 978-1-56700-244-7
Microstructures located on flat substrates contaminated with small bosses: Backscattering and substrate effects
pages 1-4
DOI: 10.1615/ICHMT.2007.ConfElectromagLigScat.30
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ABSTRAKT
The influence of the optical properties of the substrate in the backscattering of Micron-sized structures supporting sub-micron defects is analyzed by means of a parameter based on integrated backscattering calculations. This analysis is performed for two different configurations (defect on the microstructure or on the substrate), considering both dielectric and metallic substrates.
