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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
ESCI SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.2015015569
pages 135-141

WEAR RESISTANCE AND RADIATION TOLERANCE OF He+-IRRADIATED MAGNETRON SPUTTERED TiAlN COATINGS

Stanislav Konstantinov
A. N. Sevchenko Institute of Applied Physical Problems of Belarusian State University, 7 Kurchatov Str., Minsk, 220045, Republic of Belarus
F. F. Komarov
Belarusian State University, 4 Nezavisimost Ave., Minsk, 220030, Belarus; Institute of Applied Physics Problem, 7 Kurchatov Str., Minsk, 220045, Belarus
V. V. Pilko
A. N. Sevchenko Institute of Applied Physical Problems of Belarusian State University, 7 Kurchatov Str., Minsk, 220045, Republic of Belarus
V. A. Kukareko
Joint Institute of Mechanical Engineering, National Academy of Sciences of Belarus, 12 Akademicheskaya Str., Minsk, Republic of Belarus

ABSTRACT

Investigations of TiAlN coating prepared by reactive magnetron sputtering were conducted. The elemental composition was examined by the Rutherford backscattering method with 1.5 MeV helium ions. The structural properties were studied by the x-ray diffraction method, transmission and scanning electron microscopies. The mechanical properties were studied by microhardness and tribological tests. TiAlN coatings were irradiated by a High Voltage Engineering Europa B.V. ion accelerator using He+ ions with energy of 500 keV and fluences in the range from 5 × 1016 to 3 × 1017 ions/cm2. The whole complex of structural and mechanical properties of TiAlN coatings irradiated by different He+ ion fluences was studied and discussed.


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