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Telecommunications and Radio Engineering

Publicado 12 números por año

ISSN Imprimir: 0040-2508

ISSN En Línea: 1943-6009

SJR: 0.185 SNIP: 0.268 CiteScore™:: 1.5 H-Index: 22

Indexed in

Resonance Method for Thickness Determinant of Vacuum Evaporated Thin Films

Volumen 68, Edición 15, 2009, pp. 1391-1398
DOI: 10.1615/TelecomRadEng.v68.i15.70
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SINOPSIS

This paper deals with the methods of thickness measurement of the coated film by means of a quartz sensor. It has been found that the continuous control of thickness of thin films in the range of 10 to 100 nm can be exercised by the resonance method. The structure of nickel films and their thickness dependence on the resonance frequency of quartz crystal have been obtained and presented graphically.

REFERENCIAS
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  5. Azarenkov, M.О., Semenenko, V.E., and Pilipenko, М.М., Modern construction materials and composites.

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