Publicado 4 números por año
ISSN Imprimir: 1093-3611
ISSN En Línea: 1940-4360
Indexed in
SPECTROSCOPIC AND PROBE DIAGNOSTICS OF CARBON PLASMA FLOWS OF A PULSE VACUUM ARC
SINOPSIS
The high-current pulsed arc discharge in vacuum used for technology of diamond-like carbon coating deposition is considered. The pulse-periodic carbon plasma flows are generated as a result of graphite cathode sputtering with the use of four-electrode arc system with self-recovering thin-film conductor of ignition device. It was found that fluctuations of plasma radiation intensity are due to formation and decay of cathode spot groups with lifetime of 5−10 μs. Three characteristic spatial zones of discharge radiation are observed - cathode spots, diffuse radiation area of carbon ions near the cathode spots, and molecular carbon emission in the interelectrode gap near the anode attachment. The value of gas-kinetic temperature of plasma was found to be about 1000 K while the plasma electron temperature is approximately 10 eV.
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Smyaglikov I.P., Chekan N.M., Akula I.P., Pobol I.L., Rajczyk J., Spectroscopic diagnostics of a pulsed arc plasma in the presence of acetylene, Vacuum, 90, 2013. Crossref