Publicado 4 números por año
ISSN Imprimir: 1093-3611
ISSN En Línea: 1940-4360
Indexed in
FLOW AND TEMPERATURE DEPENDENCE OF PARTICLE FORMATION IN AR-SILANE RF CAPACITIVELY COUPLED PLASMAS
SINOPSIS
In this work we present an overview of our investigations on the particle formation in Silane plasma. We propose a generalized model, based on a simple balance equation, explaining the temperature and flow dependence of the agglomeration time of nano-clusters in Ar-SiH4plasmas. This model allows easy incorporation of specific mechanisms and verification of their effect on particle growth.
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Beckers J, Stoffels W W, Kroesen G M W, Temperature dependence of nucleation and growth of nanoparticles in low pressure Ar/CH4RF discharges, Journal of Physics D: Applied Physics, 42, 15, 2009. Crossref
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Beckers J., Kroesen G. M. W., Gas temperature dependence of coagulation onset times for nanoparticles in low pressure hydrocarbon plasmas, Applied Physics Letters, 103, 12, 2013. Crossref