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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Imprimir: 1093-3611
ISSN En Línea: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v7.i2.120
6 pages

EFFECTS OF PLASMA PARAMETERS ON THE PROPERTIES OF La1-xSrxMnO3 THIN LAYERS DEPOSITED IN LOW-PRESSURE RF PLASMA WAVE SHOCK REACTOR

M. Nikravech
Laboratoire de Genie des Precedes Plasmas et Traitement de Surfaces, Universite P. et M. Curie, Ecole Nationale Superieure de Chimie de Paris, 11 rue Pierre et Marie Curie 75005 Paris, France
F. Rousseau
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
Daniel Morvan
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France
Jacques Amouroux
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

SINOPSIS

Deposits of La1-xSrxMnO3 ± d used as cathode materials in solid oxide fuel cells are obtained by oxidation of nitrate precursors in a low pressure RF plasma reactor equipped with a convergent nozzle. Impedance measurements showed the role of plasma parameters on the electrical conductivity of deposits. Infrared analysis of deposits permitted to measure the role of plasma parameters on the conversion rate of nitrate precursors. Oxygen and hydroxyl radicals produced by plasma are found to be the major reactive species that lead to the oxidation of nitrate precursors in this process.


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