RT Journal Article
ID 3042a5f3273cae6a
A1 Rat, V.
A1 Andre, P.
A1 Aubreton, Jacque
A1 Elchinger, M. F.
A1 Fauchais, Pierre
A1 Lefort, A.
T1 COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF_{6} PLASMAS
JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
JO HTM
YR 2011
FD 2012-03-26
VO 15
IS 2
SP 105
OP 113
K1 SF_{6} plasma composition
K1 multi-temperature
AB In this paper we compare the compositions calculated in chemical equilibrium for an SF_{6} plasma at atmospheric pressure, in the multi-temperature model and using kinetics (33 reactions involving 18 species). The ratio of the electron temperature T_{e} to that of heavy species T_{h} was calculated as a function of electron density and an intermediate temperature T* between T_{e} and T_{h} was introduced to cope with the relationship k_{f} (T*)/k_{r}(T*) = K_{X}(T*) where k_{f} and k_{r} are the reaction rate coefficients (forward and reverse) and K_{X} the equilibrium constant. The main difference between equilibrium and kinetic calculations lies in the densities of S^{+}, S_{2}^{+}, SF^{+}, F^{−} and S^{−} species between 2,000 and 6,000 K. The multi-temperature method gives results very different from those of the kinetic calculations even when the charge loss reactions are neglected. This is in contrast to what happens with H_{2} or N_{2}.
PB Begell House
LK http://dl.begellhouse.com/journals/57d172397126f956,3f6f76556f45e3c7,3042a5f3273cae6a.html