%0 Journal Article
%A Dresvin, Sergey V.
%A Shi, Nguen Quoc
%A Ivanov, D.
%A Amouroux, Jacques
%D 2011
%I Begell House
%K modeling, ICP analysis, non-equilibrium, cold channel, 2T model
%N 1
%P 7-13
%R 10.1615/HighTempMatProc.v15.i1.20
%T CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRIUM MODEL OF AR PLASMA
%U https://www.dl.begellhouse.com/journals/57d172397126f956,3163f759560dc3ff,6d24a48d29f4b4fd.html
%V 15
%X Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz; power 2-4 kW, inner diameter of the torch 24 mm, plasma gas - argon. Plasma torch has three axial gas flows: sheath gas G1 = 20 l/min, plasma gas G2 = 2.4 l/min, transport gas G3 = 3.4 l/min. Calculations have been performed within the frame of the method of the control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
%8 2012-03-20