Suscripción a Biblioteca: Guest
Página principal de la Biblioteca Digital de ICHMT Año actual Archivos Comité Ejecutivo Centro Internacional de Transferencia de Calor y Masa


DOI: 10.1615/ICHMT.2015.IntSympAdvComputHeatTransf.840
pages 968-976

Pradeep George
New York University Abu Dhabi

Jiandong Meng
Corning Incorporated

Yogesh Jaluria
Department of Mechanical and Aerospace Engineering Rutgers-New Brunswick, The State University of New Jersey Piscataway, NJ 08854, USA


This paper considers the simulation and optimization of the Metalorganic chemical vapor deposition (MOCVD) process for the deposition of Gallium Nitride (GaN) film from the precursors, trimethylgallium (TMGa) and ammonia (NH3), carried by hydrogen (H2) in a vertical rotating-disk Sandia reactor. The focus of the study is on the average deposition rate. The level of quality needed depends on the intended application, with electronic and optical materials imposing the most stringent demands. Large area film thickness and composition uniformity are achieved by proper control of the governing transport processes. The focus is on optimizing the system and the transport processes, including chemical reactions and mass transfer that govern the deposition. The paper is composed of three parts. The first part is the simulation. Initially, the thin film deposition process is simulated using the Computational Fluid Dynamics (CFD) code, ANSYS FLUENT. The CFD model has 17 gas phase and 23 surface species participating in 17 gas phase and 52 surface reactions. These numerical simulations are used to determine the effects of important design parameters and operating conditions on the deposition rate. Design variables which have a significant effect on the deposition rate and uniformity of the deposited film are identified. Response surface for average deposition rate as a function of these design variables are generated. Compromise response surface method (CRSM) is used for the generation of the response surface. In the final part, the response surface is used to optimize the average deposition rate.

ICHMT Digital Library

Bow shocks on a jet-like solid body shape. Thermal Sciences 2004, 2004. Pulsed, supersonic fuel jets - their characteristics and potential for improved diesel engine injection. PULSED, SUPERSONIC FUEL JETS - THEIR CHARACTERISTICS AND POTENTIAL FOR IMPROVED DIESEL ENGINE INJECTION
View of engine compartment components (left). Plots of temperature distributions in centreplane, forward of engine (right). CHT-04 - Advances in Computational Heat Transfer III, 2004. Devel... DEVELOPMENT AND CURRENT STATUS OF INDUSTRIAL THERMOFLUIDS CFD ANALYSIS
Pratt & Whitney's F-135 Joint Strike Fighter Engine under test in Florida is a 3600F class jet engine. TURBINE-09, 2009. Turbine airfoil leading edge stagnation aerodynamics and heat transfe... TURBINE AIRFOIL LEADING EDGE STAGNATION AERODYNAMICS AND HEAT TRANSFER - A REVIEW
Refractive index reconstructed field. (a) Second iteration. (b) Fourth iteration. Radiative Transfer - VI, 2010. Theoretical development for refractive index reconstruction from a radiative ... THEORETICAL DEVELOPMENT FOR REFRACTIVE INDEX RECONSTRUCTION FROM A RADIATIVE TRANSFER EQUATION-BASED ALGORITHM
Two inclusion test, four collimated sources. Radiative Transfer - VI, 2010. New developments in frequency domain optical tomography. Part II. Application with a L-BFGS associated to an inexa... NEW DEVELOPMENTS IN FREQUENCY DOMAIN OPTICAL TOMOGRAPHY. PART II. APPLICATION WITH A L-BFGS ASSOCIATED TO AN INEXACT LINE SEARCH