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THEORY OF THERMODIFFUSION IN MOLTEN SEMICONDUCTOR-METAL MIXTURES AND ITS APPLICATIONS IN MEMS AND SOLAR CELL FABRICATION

DOI: 10.1615/ICHMT.2011.TMNN-2011.10
8 pages

Morteza Eslamian
University of Michigan-Shanghai Jiaotong University Joint Institute

M. Ziad Saghir
Department of Mechanical and Industrial Engineering, Ryerson University, 350 Victoria St., Toronto, ON M5B2K3, Canada

Sinopsis

In this paper, thermodiffusion (thermomigration) and convection are investigated in a binary molten semiconductor-metal mixture, which is locally present in the zone melting temperature gradient (ZMTG) method. This method is used to fabricate semiconductor devices and solar cells. Linear nonequilibrium thermodynamics is used here to study thermodiffusion, whereas convection is studied numerically.

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