Third Symposium on Turbulence and Shear Flow Phenomena
DOI: 10.1615/TSFP3
MEMS SENSORS FOR TURBULENCE MEASUREMENTS AND FLOW CONTROL
pages 511-518
DOI: 10.1615/TSFP3.870
SINOPSIS
This is a review of MEMS (Micro Electrical Mechanical Systems) based sensors for measurements of instantaneous flow quantities. Specifically sensors for fluctuating pressure and wall shear stress are the focus, and for these sensors the requirements from a fluid dynamic perspective are established, some basic design properties are discussed and a brief survey of existing MEMS sensors are given. It is found that the MEMS sensors have some obvious advantages as compared to conventional variants; however, in using MEMS sensors for turbulence measurements and flow control a significant issue is to clarify their uniqueness as compared to conventional sensors.