Page d'accueil > Auteurs, Éditeurs et Examinateurs de Begell House
A. Laugier
Laboratoire de Physique de la Matiere, UMR 5511, 7 av. J. Capelle, INSA, 69621 Villeurbanne cedex, France
Articles:
MICROWAVE PECVD SYSTEM FOR SiNx:H ANTIREFLECTION COATINGS AND HYDROGEN PASSIVATION ON MULTICRYSTALLINE SILICON - Vol. 7 '2003 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
MICROWAVE PECVD SYSTEM FOR SiNx:H ANTIREFLECTION COATINGS AND HYDROGEN PASSIVATION ON MULTICRYSTALLINE SILICON - Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003