Publication de 4 numéros par an
ISSN Imprimer: 1093-3611
ISSN En ligne: 1940-4360
Indexed in
INFLUENCE OF PLASMA TREATMENTS ON THE PROPERTIES OF SnOx THIN FILMS
RÉSUMÉ
The influence of treatment by glow discharge hydrogen and oxygen plasma on properties of undoped SnOxthin films has been studied. Films of ∼ 350−400 nm thick have been deposited on a glass substrate by magnetron sputtering in an argon-oxygen atmosphere. The dependences of structural, electrical and optical properties of SnOx films on plasma processing time have been investigated. The results are discussed in terms of SnOx thin films microstructure.
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Tompakova N.M., Dmitriyeva E.A., Lebedev I.A., Serikkanov A.S., Grushevskaya E.A., Mit' K.A., Fedosimova A.I., Influence of hydrogen plasma on SnO2 thin films, Materials Today: Proceedings, 25, 2020. Crossref