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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
ESCI SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN Imprimer: 1093-3611
ISSN En ligne: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v10.i4.120
pages 617-624

EXPERIMENTAL STUDY OF A PULSE PLASMA FLOW IN A MODE OF DIAMOND-LIKE COATING DEPOSITION

I. P. Smyaglikov
Physical Technical Institute, National Academy of Sciences of Belarus, Minsk, Belarus
A. I. Zolotovsky
Institute of Molecular and Atomic Physics of NAS of Belarus, 70 Skaryna Av., 220072 Minsk, Belarus
V. G. Tatur
Scientific Engineering Centre "Plasmoteg", 1 Academician Kuprevich Str., Building 3, 220141 Minsk, Belarus
E .I. Tochitsky
Scientific Engineering Centre "Plasmoteg", 1 Academician Kuprevich Str., Building 3, 220141 Minsk, Belarus

RÉSUMÉ

Carbon plasma flows for deposition of diamond-like films are generated in a vacuum chamber with residual pressure of down to 5·10−5 Torr with the use of four-electrode system with graphite cathode and self-recovering thin-film conductor of an ignition device. The pulse-periodic flows of the carbon arc plasma are considered at discharge current of 4−10 kA, duration of pulses of 100−200 μs and the pulse repetition rate of up to 30 Hz. The form and amplitude of voltage and current of pulses of igniting, supporting and main discharges, and the form of light pulse in various zones of the discharge were measured. Emission spectra of carbon erosive plasma were recorded. The information on reproducibility of the arc discharge of short duration was obtained as well.


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