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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Publication de 4  numéros par an

ISSN Imprimer: 1093-3611

ISSN En ligne: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF6 PLASMAS

Volume 15, Numéro 2, 2011, pp. 105-113
DOI: 10.1615/HighTempMatProc.v15.i2.30
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RÉSUMÉ

In this paper we compare the compositions calculated in chemical equilibrium for an SF6 plasma at atmospheric pressure, in the multi-temperature model and using kinetics (33 reactions involving 18 species). The ratio of the electron temperature Te to that of heavy species Th was calculated as a function of electron density and an intermediate temperature T* between Te and Th was introduced to cope with the relationship kf (T*)/kr(T*) = KX(T*) where kf and kr are the reaction rate coefficients (forward and reverse) and KX the equilibrium constant. The main difference between equilibrium and kinetic calculations lies in the densities of S+, S2+, SF+, F and S species between 2,000 and 6,000 K. The multi-temperature method gives results very different from those of the kinetic calculations even when the charge loss reactions are neglected. This is in contrast to what happens with H2 or N2.

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