%0 Journal Article %A Garot-Piant, A. %A Le Cornec, A. %A Lebrun, J.L. %A Paturaud, C. %D 1998 %I Begell House %K PVD, texture, stress, x-ray diffraction, tungsten coatings %N 3 %P 401-418 %R 10.1615/HighTempMatProc.v2.i3.90 %T HETEROGENEITY OF TEXTURES AND STRESSES IN A LARGE TUNGSTEN PVD FILM %U https://www.dl.begellhouse.com/journals/57d172397126f956,423052260f19c0dc,2954e7dd6b3cc213.html %V 2 %X This study deals with texture and stresses evaluations on tungsten coating on a large steel plate (150*240 mm2), as a function of its position with the magnetron target.
The films obtained by Physical Vapour Deposition process often reveal a fiber texture, implying a residual stress determination impossible by the usual X-rays diffraction method. The beam curvature technique is also difficult to apply in the case of thick substrates, justifying our interest of the x-rays diffraction methods. The stress determination method is then the Ideal Directions Method.
· About the heterogeneity all over the film, at the coating surface, an almost perfect <111> fiber texture with slight reinforcements and a very high compressive (around -3000 MPa) and almost isotropic stress level are observed. The fiber texture presents a progressive W inclination in connection with the columnar morphology, according to the short and long target axis; this inclination is in relation with ion incidence direction. About stresses, they are rather homogeneous all over the surface with a small decrease.
· About the heterogeneity within the thickness, the <111> fiber texture transforms towards a (110) <110> texture toward the interface and a slight stress gradient is observed. %8 1998-08-30