Published 12 issues per year
ISSN Print: 0040-2508
ISSN Online: 1943-6009
Indexed in
APPLICATION OF FOCUSED CHARGE-PARTICLE BEAMS OF IN MANUFACTURING OF NANOCOMPONENTS
ABSTRACT
Application of focused beams of medium energy light ions, electrons and low energy heavy ions is considered for the technology of manufacturing of small-dimension components. Physical principles applied as the basis for interaction of the above beams with resistive materials are described. The proton beam lithography is considered as a new technology possessing high potential capabilities for various applications like micro-optics and nanoelectronics of terahertz wave band.
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Vorobiyov G. S., Shulga Yu. V., Ponomaryova A. A., On possibility of application of periodic metal-dielectric structures in practical schemes of devices of terahertz wavelength range, 2010 20th International Crimean Conference "Microwave & Telecommunication Technology", 2010. Crossref
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Oleksandr Rybalko, Buriak I. A., Zhurba V.O., Rybalko Yu. A., Resonant quasi-optical systems with multi-row periodic structures, 2017 International Conference on Information and Telecommunication Technologies and Radio Electronics (UkrMiCo), 2017. Crossref