ISSN Print: 0040-2508
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Telecommunications and Radio Engineering
THE LOCAL MICROWAVE HEATING TECHNOLOGY
I. N. Bondarenko
Kharkiv National University of Radio Engineering and Electronics, 14, Nauka Ave, Kharkiv, 61166, Ukraine
G. N. Bendeberya
Tavriya National University, 4, Vernadskogo ave., Simpheropol, 95007, Ukraine; Kharkiv National University of Radio Electronics, 14 Nauka Ave, Kharkiv 61166, Ukraine
A. B. Galat
Kharkiv National University of Radio Engineering and Electronics, 14, Lenin Ave, Kharkiv, 61166, Ukraine
Kharkiv National University of Radio Electronics, 14 Nauka Ave, Kharkiv 61166, Ukraine
Experimental studies of the possibilities of practical implementation of local microwave heating technology have been carried out. The correspondence of the existing theoretical models of the process to what is happening in practice is shown. The results of measuring the temperature distribution over the sample when exposed to a radiating microwave coaxial probe are given. The directions for further improvement of the operating modes and the main components of the microwave modifier are determined.
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Foggiato, J. and Yoo, W.S., (2006) Implementation of flash technology for ultra-shallow junction formation: challenges in process integration, Journal of Vacuum Science and Technology, B24, pp. 515-520.
Chu, P.K., (2003) Semiconductor applications of plasma immersion ion implantation, Plasma Physics and Controlled Fusion, 45, pp. 555-570.
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Sarubbi, F., Scholtes, T.L.M., and Nanver, L.K., (2010) Chemical vapor deposition of boron layers on silicon for controlled nanometer-deep p+n junction formation, Journal of Electronic Materials, 39, pp. 162-173.
Jerby, E. and Dikhtyar, V., (2002) Drilling into hard non-conductive materials by localized microwave radiation, Trends in Microwave and HF Heating, Springer Verlag, pp. 1-9.
Livshits, P., Dikhtyar, V., Inberg, A., Shahadi, A., and Jerby, E., (2011) Local doping of silicon by a point-contact microwave applicator, Microelectronic Engineering, 88, pp. 2831-2836.
Meir, Y. and Jerby, E., (2012) Localized rapid heating by low-power solid-state microwave drill, IEEE Transactions on Microwave Theory and Techniques, 60(8), pp. 2665-2672.
James, R.B., Bolton, P.R., Alvarez, R.A. et al., (1988) Melting of silicon surfaces by high-power pulsed microwave radiation, Journal of Applied Physics, 64, pp. 3243-3253.
Herskowits, R., Livshits, P., Stepanov, S. et al., (2007) Silicon heating by a microwave-drill applicator with optical thermometry, Semiconductor Science and Technology, 22, pp. 863-869.
Jerby, E., Dichtyar, V., Aktushev, O., and Grosglick, U., (2002) The microwave drill, Science, 298, pp. 587-589.
Jerby, E., Aktushev, O., and Dikhtyar, V., (2004) Theoretical analysis of the microwave-drill near-field localized heating effect, Journal of Applied Physics, 97, pp. 034909-1-034909-7.
Chen, L.F., Ong, C.K., Neo, C.P., Varadan, V.V., and Varadan, V.K., (2004) Microwave Electronics: Measurement and Materials Characterization, John Willy & Sons, Ltd, 537 p.
Gordienko, Yu.Ye., Larkin, S.Yu., and Yatskiv, A.M., (2009) Near-field microwave sensor based on a conical coaxial resonator, Radiotekhnika, 159, pp. 309-314, (in Russian).
Davidovich, M.V., (2006) Coaxial probe for monitoring parameters of a multilayer magnetodielectric: direct and inverse problems, Radioengineering and Electronics, 51(11), pp. 1308-1315, (in Russian).
Gordienko, Yu.Ye., Gud, Yu.I., Koryagina, E.U., and Slipchenko, N.I., (2007) Single-mode resonator measuring transducers in the general theory of microwave diagnostics of materials, Radioelectronika and Informatika, 2, pp. 4-8, (in Russian).
Gordienko, Yu.Ye., Poletaev, D.A., Prokaza, A.M., and Slipchenko, N.I., (2013) High-local microwave heating of semiconductors and dielectrics, Applied Radio Electronics, 11(3), pp.426-430, (in Russian).
Gordienko, Yu.Ye., Larkin, S.Yu., and Chkhotua, M.S.E., (2012) Contactless mode of operation with scanning microwave microscopy, Radiotekhnika, 170, pp. 73-78, (In Russian).
Gordienko, Yu.Ye., Levchenko, A.V., and Scherbak, E.L., (2015) Influence of the gap between the probe and the object on the high local scanning microwave heating of materials, Applied Electronics, 3, pp. 240-245, (in Russian).
Gordienko, Yu.Ye., Polishchuk, A.V., and Pyataykina, M.I., (2015) Microwave high-local scanning heating in the technology of micro-and nanoelectronics, Physical Surface Engineering, 13(2), pp. 209-217, (in Russian).
Gordienko, Yu.Ye., Shcherbak, Ye.L., and Levchenko, A.V., (2015) Basic principles of the theory of high-local scanning microwave heating of semiconductors and dielectrics, Physical Surface Engineering, 13(3), pp. 348-355, (in Russian).
Gordienko, Yu.Ye., Slipchenko, N.I., Larkin, S.Yu., and Shcherbak, Ye.L., (2015) Local MW Heating-Up Kinetics in Semiconductors and Dielectrics, Telecommunication and Radio Engineering, 74(9), pp. 787-795.
Bondarenko, I.N., Gordienko, Yu.Ye., and Levchenko, A.V., (2016) Submillimetric localization of microwave diagnostics and modification of objects of various nature, 9<sup>th</sup> International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMV'2016), Kharkiv, Ukraine.
Bondarenko, I.N., Gorbenko, E.A., and Krasnoshok, V.I., (2017) Microwave switch based on waveguide T-junction for compression resonant pulse former, Telecommunications and Radio Engineering, 76(6), pp. 469-475.
Bondarenko, I.N., Gorbenko, E.A., and Krasnoshok, V.I., (2018) Microwave switch based on a combined coaxial-waveguide tee for a cavity pulse shaper, Telecommunications and Radio Engineering, 77(5), pp. 391-397.
Bondarenko, I.N. and Gorbenko, E.A., (2018) Formation of powerful microwave pulses using resonator storage, Telecommunications and Radio Engineering, 77(15), pp.1311-1319.
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