Published 12 issues per year
ISSN Print: 0040-2508
ISSN Online: 1943-6009
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QUASIOPTICAL SCALE MODELING OF THE INFLUENCE OF METAL SURFACE LOCALIZED DEFECTS BASED ON THE OPTICAL ELLIPSOMETRY DATA
ABSTRACT
Ellipsometry is a highly sensitive, non-contact, non-destructive method for investigation of surfaces and interphase boundaries. It is based on the study of the probe electromagnetic wave polarization changes as a result of its interaction with the boundary between the media. A special problem in the analysis of the ellipsometric data are surface defects including roughness, island films, regular relief, some localized defects. To date, there are no adequate models describing the effect of localized surface defects on the results of the ellipsometric experiments. Previously, it has been suggested that localized defects under certain conditions may not affect the ellipsometric data. The aim of this work is to test this hypothesis by conducting systematic studies of the influence of defects in the form of parallelepipeds of various sizes on the ellipsometric data. Scale modeling of influence of defects typical for surface subjected to radiation spraying on ellipsometric experiment results in the optical range has been performed using developed terahertz ellipsometer that operates at a wavelength of 2.2 mm (0.14 THz). Such a large operating wavelength allows formation of the surface defects of given shape and size and to investigation their impact on the ellipsometric parameters. The description of the ellipsometer and the results of systematic studies of the influence of various defects on the surface of the material with strong absorption on ellipsometry data are presented. It has been found experimentally that the localized defects of the size comparable to the wavelength can be "invisible" for ellipsometry.
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Belyaeva A. I., Galuza A. A., Khaimovich P. A., Kolenov I. V., Savchenko A. A., Solodovchenko S. I., Shul’gin N. A., Effect of various kinds of severe plastic deformation on the structure and electromechanical properties of precipitation-strengthened CuCrZr alloy, The Physics of Metals and Metallography, 117, 11, 2016. Crossref
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Galuza Alexey A., Kiseliov Vladimir K., Kolenov Ivan V., Belyaeva Alla I., Kuleshov Yevgeny M., Developments in THz-Range Ellipsometry: Quasi-Optical Ellipsometer, IEEE Transactions on Terahertz Science and Technology, 6, 2, 2016. Crossref
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Belyaeva Alla, Galuza Alexey, Kolenov Ivan, Savchenko Alla, Influence of Pit-Type Localized Defects on the Optical Ellipsometry and Reflectometry Data: Quasi-optical Scale Modeling, 2019 IEEE 2nd Ukraine Conference on Electrical and Computer Engineering (UKRCON), 2019. Crossref
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Kolenov I.V., Nesterov P.K., Nesterov I.A., Lukash A.S., Bezborodov V.I., Mizrakhy S.V., Application Features of Pyroelectric Detector for THz Wave Receiving, 2020 IEEE Ukrainian Microwave Week (UkrMW), 2020. Crossref
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Galuza A., Kolenov I., Vinnikov D., Mizrakhy S., Savchenko A., Investigation of micro-arc oxidation coatings using sub-THz ellipsometry, Materials Characterization, 189, 2022. Crossref
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Belyaeva Alla, Galuza Alexey, Kolenov Ivan, Mizrakhy Sergey, Developments in Terahertz Ellipsometry: Portable Spectroscopic Quasi-Optical Ellipsometer-Reflectometer and Its Applications, Journal of Infrared, Millimeter, and Terahertz Waves, 42, 2, 2021. Crossref