Published 12 issues per year
ISSN Print: 0040-2508
ISSN Online: 1943-6009
Indexed in
THE MODEL OF NUMERICAL INVESTIGATION OF HIGHLY LOCALIZED THERMAL EFFECT OF THE MICROWAVE ELECTROMAGNETIC FIELD UPON SEMICONDUCTIVE SUBSTANCES
ABSTRACT
The numerical analytical algorithm is substantiated and the software for investigation of the phenomena of highly localized microwave heating of the positioned domains in semiconductors and dielectrics is developed.
The algorithm is based on a joint coordinated solution of the Maxwell equations and the non-stationary heat conduction equation using the FDTD method. At that, it is possible to consider the temperature dependences of the substance parameters allowing investigation of the localized heating mode with peaking.
To provide for simultaneous high convergence of the solutions, acceptable solution accuracies and real-time mode of calculations a various time scale for solving of the electrodynamic and the temperature problems is used along with the adaptive spatial grid. The results of comparison with the FEM method are provided.
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Gordienko Yu. E., Slipchenko N. I., Poletaev D. A., Prokaza A. M., Pyataikina M. I., Patterns of microwave modification of semiconductor thin film structures, 2014 24th International Crimean Conference Microwave & Telecommunication Technology, 2014. Crossref
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Gordienko Yu. O., Larkin S. Yu., Slipchenko M. I., Csherbak Ye. L., Microwave micromodifier power mode optimization for microtechnologies, 2014 24th International Crimean Conference Microwave & Telecommunication Technology, 2014. Crossref
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Taran E. P., Gordienko Yu. E., Slipchenko N. I., Dynamics of development of thermal processes in semiconductor structures at the local effects of microwave radiation, 2014 24th International Crimean Conference Microwave & Telecommunication Technology, 2014. Crossref