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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.19 SNIP: 0.341 CiteScore™: 0.43

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v1.i2.110
pages 273-285

THERMAL CONDITION CONTROL OF AN ARC PLASMA CF4 REACTOR: SWAN BAND SPECTRUM FOR TEMPERATURE MEASUREMENTS

Stephane Pellerin
GREMI, CNRS-Universite d'Orleans, BP 6759, 45067 Orleans Cedex 2, France LASEP, Universite d'Orleans - Antenne de Bourges, BP4043, 18028 Bourges, France
K. Musiol
Marian Smoluchowski Inst. of Physics, Jagellonian University, ul. Reymonta 4,30-459 Krakow, Poland
B. Pokrzywka
Mt.Suhora, Observatory of Cracow Pedagogical University, ul. Podchorazych 2, 30-084, Krakow, Poland
J.-M. Cormier
GREMI-ESPEO, CNRS-Universite d'Orleans, BP 6759, 45067 Orleans Cedex 2, France
J. Chapelle
LASEP, Centre Universitaire de Bourges, Rue Gaston Berger, BP 4043, 18028 Bourges Cedex, France

ABSTRACT

Noisy and spectrally not well resolved molecular emission spectra of the 516.611 nm Swan band of the C2 molecule were employed for evaluation of the rotational temperature in different plasma sources. This diagnostic method may be applied in the temperature range from 300K to 6000K. It is especially useful when the apparatus function of a recording system is unknown The described method is based on a comparison of experimental data with the theoretically calculated spectrum. The numerical minimisation procedure is started with the temperature value obtained from the Boltzmann plot or intensity ratio of two selected spectrum components. A particular attention was paid to this point because it seems, that the departure from the local thermodynamic equilibrium (LTE), observed by several authors, can be due to an error in data evaluation. La bande de Swan C2(d3Πgv'=0) → C2(a3Πu,v"=0) a 516.611 nm, bruitee et spectralement mal resolue. pent etre employee pour evaluer la temperature rotationnelle dans differents generateurs de plasma, dans une gamme etendue de temperature (jusqu 'a 6000K). La methode decrite est basee sur la comparaison des donnees experimentales avec un spectre theorique, la procedure numerique etant initiee a I'aide d'une premiere estimation de la temperature obtenue a partir d'un graphe de Boltzmann, ou en utilisant une "fonction test". Une attention particuliere est faite pour distinguer un eventuel ecart a l'equilibre thermodynamique local (ETL) des eventuelles erreurs de traitement des donnees...


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