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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.19 SNIP: 0.341 CiteScore™: 0.43

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v14.i1-2.130
pages 157-163

SPECTROSCOPIC AND PROBE DIAGNOSTICS OF CARBON PLASMA FLOWS OF A PULSE VACUUM ARC

I. P. Smyaglikov
Physical Technical Institute, National Academy of Sciences of Belarus, Minsk, Belarus
N. I. Chubrik
B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Nezavisimost Ave., Minsk, 220072, Belarus
S.V. Goncharik
B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Nezavisimost Ave., Minsk, 220072, Belarus
V. V. Azharonok
Institute of Physics of NAS of Belarus,68 Independence Av., 220072 Minsk
L. E. Krat'ko
Institute of Physics of NAS of Belarus,68 Independence Av., 220072 Minsk
N. M. Chekan
Scientific Engineering Centre "Plasmoteg", 1 Academician Kuprevich Str., Building 3, 220141 Minsk

ABSTRACT

The high-current pulsed arc discharge in vacuum used for technology of diamond-like carbon coating deposition is considered. The pulse-periodic carbon plasma flows are generated as a result of graphite cathode sputtering with the use of four-electrode arc system with self-recovering thin-film conductor of ignition device. It was found that fluctuations of plasma radiation intensity are due to formation and decay of cathode spot groups with lifetime of 5−10 μs. Three characteristic spatial zones of discharge radiation are observed - cathode spots, diffuse radiation area of carbon ions near the cathode spots, and molecular carbon emission in the interelectrode gap near the anode attachment. The value of gas-kinetic temperature of plasma was found to be about 1000 K while the plasma electron temperature is approximately 10 eV.


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