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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v2.i1.120
pages 155-163

A SIMPLIFIED COMPUTATION OF THE ELECTRICAL CHARACTERISTICS OF A RF INDUCTION PLASMA

Jean Pierre Ploteau
GE44 - LRTI / CRTT - BP 406 - 44602 Saint-Nazaire cedex - France
J. Fouladgar
GE44 - LRTI / CRTT - BP 406 - 44602 Saint-Nazaire cedex - France
G. Develev
GE44 - LRTI / CRTT - BP 406 - 44602 Saint-Nazaire cedex - France

ABSTRACT

The simplified simulation of an induction RF plasma torch is made using a transformer model. The primary of the transformer is the plasma and the secondary is constituted by the inductor. The plasma size is approximated for a given quartz torch, and a given supplied voltage. This model allows us to obtain the electrical characteristics of the plasma torch. The electrical behaviour of the plasma is observed for different voltages, and for different argon flow rates. Then, the obtained results are compared with more advanced numerical models. The results are in good agreement with measurements developed on the 30 kW radio frequency installation.