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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Impact factor: 0.058

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v5.i4.80
10 pages

FARADAY CUP MEASUREMENTS OF ION BEAMS GENERATED BY HIGH-TEMPERATURE PLASMA

Jaroslaw Baranowski
The Andrzej Soltan Institute for Nuclear Studies (IPJ) 05-400 Otwock-Swierk by Warsaw, Poland
Marek Sadowski
Department of Plasma Physics and Technology (P-V) The Andrzej Soltan Institute for Nuclear Studies (IPJ) 05-400 Otwock-Swierk by Warsaw, Poland
Elzbieta Skladnik-Sadowska
The Andrzej Soltan Institute for Nuclear Studies (IPJ) 05-400 Otwock-Swierk by Warsaw, Poland

ABSTRACT

The first part of the paper presents results of experimental studies of deuterium- and nitrogen-ions which are produced within the RPI (Rod Plasma Injector) devices (called also the IONOTRON-type systems) equipped with fast-acting electromagnetic gas-valves. The second part concerns results of measurements of the plasma potential, as performed by means of Faraday-type collectors (FC). The last part describes an example of the application of the FC technique to studies of nitrogen-ions energies during the implantation process performed with the use of pulsed plasma-ion streams. It is shown that the modem FC-type collectors can be useful for basic research in the field of plasma physics as well for measurements in pulsed plasma facilities used for technological applications.