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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.19 SNIP: 0.341 CiteScore™: 0.43

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v13.i3-4.110
pages 381-398

A FLEXIBLE LOW PRESSURE PLASMA PROCESS FOR THE DEPOSITION OF COMPLEX THICK OXIDE COATINGS

F. Rousseau
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
S. Awamat
Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
Daniel Morvan
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

ABSTRACT

The deposition of complex oxide layers for Solid Oxide Fuel Cell membranes (SOFC) or Thermal Barrier Coating (TBC) in gas turbines is a current subject of investigation. A low pressure plasma reactor was developed to very quickly and easily deposit thick oxide coatings presenting various compositions. The reactor is equipped with an injection system which enables the introduction of nitrate salts dissolved in aqueous solution under a spray form into the reactor. The velocity and the diameter of the droplets of the spray were measured on line by using a particle dynamics analyser coupled with the plasma reactor. Droplet velocity of more than 30 m. s−1 was measured at the exit of the nozzle. Optical emission spectroscopy showed that the high vaporization of water from droplets observed by the particle dynamic analyser was a favorable feature for the production of OH° radicals due to the dissociation of H2O in the discharge. Infrared spectroscopy confirmed that O and OH° were responsible for the transformation of nitrates into solid oxide at low temperature. The morphologies of ZrO2-Y2O3 coatings (YSZ 4% mol of Y) and Ba3MgTa2O9 for TBC application obtained after optimizing plasma parameters have been characterized by scanning electron microscopy.


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