@article{Vinogradov_2006 author = {A. Ya. Vinogradov and A. N. Andronov and A. B Ustinov and K. E. Orlov and A. S. Smirnov}, title = {LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON FILMS ON DIFFERENT SUBSTRATES}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {2006}, volume = {10}, number = {3}, pages = {457--466} }