年間 12 号発行
ISSN 印刷: 0040-2508
ISSN オンライン: 1943-6009
Indexed in
APPLICATION OF THE SPECTRAL INTERFEROMETRY METHOD FOR MICRO-AND NANODISTANCE MEASUREMENT
要約
The result of the investigations into the optical interferometry using the low-coherent radiation sources beyond the coherence zone are presented. It is shaven that when the difference in the Michelson interferometer arms exceeds the coherence length of a light-emitting diode (LED) radiation, the spectral interference phenomenon may well be utilized to make measurements of micro- and nanodistances depending upon the delay time and the relative phase between the reference and probing signals.
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Lukin Konstantin A., Tatyanko Dmytro N., Pikh Alona B., Application of optical spectral interferometry for thin film thickness measurement, 2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW), 2016. Crossref
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Lukin K. A., Tatyanko D. N., Zemlyaniy O. V., Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method, RADIOFIZIKA I ELEKTRONIKA, 22, 1, 2017. Crossref
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Lukin Konstantin A., Tatyanko Dmytro N., Zemlyaniy Oleg V., Pikh Alona B., Noise waveform reflectometer based on LED and spectral interferometry technique, 2017 Signal Processing Symposium (SPSympo), 2017. Crossref