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Telecommunications and Radio Engineering
SJR: 0.202 SNIP: 0.2 CiteScore™: 0.23

ISSN 印刷: 0040-2508
ISSN オンライン: 1943-6009

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Telecommunications and Radio Engineering

DOI: 10.1615/TelecomRadEng.v74.i2.60
pages 171-181

QUASIOPTICAL SCALE MODELING OF THE INFLUENCE OF METAL SURFACE LOCALIZED DEFECTS BASED ON THE OPTICAL ELLIPSOMETRY DATA

A. I. Belyaeva
National Technical University "Kharkiv Politechnic Institute" 21, Frunze St., Kharkiv, 61002, Ukraine
A. A. Galuza
Institute of Electrophysics and Radiation Technologies of the National Academy of Sciences of Ukraine 28, Chernyshevsky St., Kharkiv, 61002, Ukraine
V. K. Kiseliov
A. Usikov Institute of Radio Physics and Electronics, National Academy of Sciences of Ukraine; V.N.Karazin Kharkiv National University 4, Svobody sq., 61022, Kharkiv, Ukraine
I. V. Kolenov
Institute of Electrophysics and Radiation Technologies of the National Academy of Sciences of Ukraine 28, Chernyshevsky St., Kharkiv, 61002, Ukraine
A. A. Savchenko
National Technical University "Kharkiv Politechnic Institute" 21, Frunze St., Kharkiv, 61002, Ukraine
Ye. M. Kuleshov
A.Ya. Usikov Institute for Radiophysics and Electronics of the National Academy of Sciences of Ukraine 12, Academician Proskura St., Kharkiv 61085, Ukraine
S. Yu. Serebriansky
Institute of Electrophysics and Radiation Technologies of the National Academy of Sciences of Ukraine 28, Chernyshevsky St., Kharkiv, 61002, Ukraine

要約

Ellipsometry is a highly sensitive, non-contact, non-destructive method for investigation of surfaces and interphase boundaries. It is based on the study of the probe electromagnetic wave polarization changes as a result of its interaction with the boundary between the media. A special problem in the analysis of the ellipsometric data are surface defects including roughness, island films, regular relief, some localized defects. To date, there are no adequate models describing the effect of localized surface defects on the results of the ellipsometric experiments. Previously, it has been suggested that localized defects under certain conditions may not affect the ellipsometric data. The aim of this work is to test this hypothesis by conducting systematic studies of the influence of defects in the form of parallelepipeds of various sizes on the ellipsometric data. Scale modeling of influence of defects typical for surface subjected to radiation spraying on ellipsometric experiment results in the optical range has been performed using developed terahertz ellipsometer that operates at a wavelength of 2.2 mm (0.14 THz). Such a large operating wavelength allows formation of the surface defects of given shape and size and to investigation their impact on the ellipsometric parameters. The description of the ellipsometer and the results of systematic studies of the influence of various defects on the surface of the material with strong absorption on ellipsometry data are presented. It has been found experimentally that the localized defects of the size comparable to the wavelength can be "invisible" for ellipsometry.


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