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Telecommunications and Radio Engineering
SJR: 0.202 SNIP: 0.2 CiteScore™: 0.23

ISSN 印刷: 0040-2508
ISSN オンライン: 1943-6009

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Telecommunications and Radio Engineering

DOI: 10.1615/TelecomRadEng.v76.i13.60
pages 1181-1192

SPECTRAL INTERFEROMETRY IN THICKNESS MEASUREMENTS OF OPTICALLY TRANSPARENT LAYERED STRUCTURES

K. A. Lukin
A.Ya. Usikov Institute for Radiophysics and Electronics of the National Academy of Sciences of Ukraine 12, Academician Proskura St., Kharkiv 61085, Ukraine
D. N. Tatyanko
A. Usikov Institute of Radio Physics and Electronics,National Academy of Sciences of Ukraine, 12, Academician Proskura St., Kharkiv 61085, Ukraine
A. B. Pikh
O.Ya. Usikov Institute for Radio Physics and Electronics, National Academy of Sciences of Ukraine, 12 Academician Proskura St., Kharkiv 61085, Ukraine
O. V. Zemlyanyi
A. Usikov Institute of Radio Physics and Electronics, National Academy of Sciences of Ukraine 12, Academician Proskura St., Kharkov 61085, Ukraine

要約

The authors are exploring the applicability of the optical-band spectral interferometry in thin film thickness measurements. Analytical and experimental methods have been employed to investigate the spectrum of the total irradiation at the output of the fiber optic Fabry-Perot interferometer, being formed by broadband light reflections from multilayer structures, including the special case of two reflections with thin films being the object of study. Useful spectrum components carrying the data on the distance to the reflecting surfaces have been detected. The results of experiments with broadband LED light sources perfectly agree with the theoretical findings. A software tool with a graphical user interface has been developed to process and visualize the experimental data. The obtained results will help improve the performance of the measuring equipment in medicine, profilometry, and create standards for metrology.


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