年間 4 号発行
ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360
Indexed in
CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRJUM MODEL OF AR PLASMA
要約
Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz, power 2 − 4 kW, inner diameter of the torch 24 mm, plasma gas − argon. Plasma torch has three axial gas flows: sheath gas G1=20 l/min, plasma gas G2=2.4 l/min, transport gas G3=3.4 l/min. Calculation has been performed within the frame of the method of control volume.
The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
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Kovářík Ondřej, Fan Xiaobao, Boulos Maher, In Flight Properties of W Particles in an Ar-H2 Plasma, Journal of Thermal Spray Technology, 16, 2, 2007. Crossref