年間 4 号発行
ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360
Indexed in
STRUCTURE AND MECHANICAL PROPERTIES OF Nb−Al−N NANOCOMPOSITE FILMS AS A FUNCTION OF THE DEPOSITION PARAMETERS
要約
Nb−Al−N films were deposited by magnetron sputtering of Nb and Al in an atmosphere of Ar−N2 onto silicon wafers, at different currents of magnetron power supply, on which an aluminum (IAl) target is mounted. The films were studied by X-ray diffractometry, nano- and microindentation. The size of nanocrystals, microstrain, nanohardness, and the elastic modulus are extremely dependent on IAl. The films exhibit nanohardness and Knoop hardness in the range 29−33.5 GPa and 46−48 GPa, respectively.
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Lisovenko M.O., Bondar O.V., Opielak M., Beresnev V.M., Konarski P., Sakenova R.E., Konstantinov S.V., Komarov F. F., Structure and properties of nanoscale MoN/CrN multilayered coatings, 2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP), 2017. Crossref