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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v5.i3.150
6 pages

DEPOSITION OF TiN COATINGS WITH THE USE OF A COAXIAL HYBRID SOURCE

Jan Walkowicz
Institute for Terotechnology, 26-600 Radom, ul. Pulaskiego 6/10, Poland
Krzysztof Miernik
Institute for Terotechnology, ul. Pulaskiego 6/10, 26-600 Radom, Poland

要約

The new hybrid plasma source which is the combination of a cylindrical DC magnetron with a pulsed coaxial accelerator was investigated. The results of the study of discharge characteristics and properties of deposited TiN coatings are presented. The influence of pulsed ion bombardment on the chemical composition of deposited coatings is shown.


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