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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

年間 4 号発行

ISSN 印刷: 1093-3611

ISSN オンライン: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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EXCITED SPECIES AND C-ATOM DENSITY DOWNSTREAM AN Ar PLASMA TORCH WITH OLEFINS (CH4, CF4) IN IMPURITY

巻 1, 発行 4, 1997, pp. 485-492
DOI: 10.1615/HighTempMatProc.v1.i4.70
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要約

Excited species in an Ar plasma torch (40 MHz, 3 kW) with hydro- and halo-carbons in impurity have been analysed by emission spectroscopy. Two types of quantitative results have been obtained. The first one concerns the vibrational temperature of radicals. The vibrational temperatures of C2 and CN molecules have been found to increase from 4 to 6 × 103 K when going from an Ar-l%o CH4 to an Ar – l%o CF4 gas mixture. Such temperature values are a first step to analyse the departure to LTE inside the plasma jet and to appreciate the stabilization of HF molecule produced in Ar-H2-CF4 plasma torch. A second quantitative result is the determination of C-atom in impurity in the post-discharge of Ar-CH4 plasma torch. The C-atom density determined in a post-discharge tube by chemiluminescent reaction with N atoms, at a time of 3 × 10−2 sec. after the Ar plasma torch, was found in the order of 1019 m−3 with 10−3 CH4 into Ar, that is the ppm range (10-6 ratio of the total density).

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